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Principles of Plasma Discharges and Materials Processing
Link Details for:
Principles of Plasma Discharges and Materials Processing
Link Title:
Principles of Plasma Discharges and Materials Processing
Link URL:
http://diva.eecs.berkeley.edu/~lieber/Textbook2.html
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M. Lieberman and A. Lichtemberg. This book discusses the fundamental principles of partially ionized, chemically reactive plasma discharges and their use in thin-film processing among other applications.
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Top : Science : Physics : Plasma : Books
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Link Details for: Principles of Plasma Discharges and Materials Processing
