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Plasma
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Research_Software
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Hybrid Plasma Equipment Model
Link Details for:
Hybrid Plasma Equipment Model
Link Title:
Hybrid Plasma Equipment Model
Link URL:
http://uigelz.ece.iastate.edu/
Link Details:
Software developed at the University of Illinois for numerical simulation of inductively coupled reactive ion etching reactors.
Category:
Top : Science : Physics : Plasma : Research_Software
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