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Hybrid Plasma Equipment Model

  Link Details for: Hybrid Plasma Equipment Model
Link Title: Hybrid Plasma Equipment Model Open in a new window
Link URL: http://uigelz.ece.uiuc.edu/Projects/HPEM-ICP/index.html
Link Details: Software developed at the University of Illinois for numerical simulation of inductively coupled reactive ion etching reactors.
Category: Top : Science : Physics : Plasma : Free_Software
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Hybrid Plasma Equipment Model